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Si Nano-Particle Characterization by Atomic Force Microscopy

Journal Name:

  • International Journal of Science and Engineering Investigations

Publication Year:

  • 2016

Key Words:

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Abstract (2. Language): 
Nano-particles have been playing an active role in material science and technology for decades, however, there is a lack of efficient and direct method to characterize nano-particle sizes. In this paper, Si nano-particles were prepared by annealing a very thin amorphous Si layer (11nm in thickness) and atomic force microscopy (AFM) was used for investigation. In order to compare the AFM results with the values obtained by other methods, a standardized image processing flow was established to extract particle size and other information, which was applied to all the image results involved in this study. As expected, results extracted from AFM images are larger than those from e-beam imaging techniques due to the AFM tip/probe induced topography convolutions. In order to compensate the convolution, a simplified geometry model was created and applied to the current study. The AFM results after deconvolution are satisfying and this study also proved that AFM analysis with tip/probe deconvolution is a very suitable technique in characterizing Nano-particles with high efficiency and accuracy.
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REFERENCES

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